Output 2006
Research articles in refereed specialist journals
Journal of Vacuum Science & Technology A
Gatzert C, Blakers A W, Deenapanray PNK, Macdonald D, Auret FD: 2006. Investigation of reactive ion etching of dielectrics and Si in CHF_3/O_2 or CHF_3/Ar for photovoltaic applications. 24 (5) / Sep/Oct, pp 1857-1865.
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